Massively parallel AFM cantilever array

PhD student
Supervisor
Supervisor
Promoter

Mehmet Tamer
Hamed Sadeghian
Hans Goosen
Fred van Keulen

Duration

2013-2017

 In this project, we are interested in system design and construction of 2D parallel AFM cantilevers operating together to inspect the wafer surface before fabrication process and to increase the throughout of the AFM.

No publications available.

Partners

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