Integrated 3D Motion System Synthesis for High-Performance Semiconductor Equipment: IMSYS-3D

Arnoud Delissen (PhD candidate), Reinaldo Astudillo (EWI), Martin van Gijzen (EWI), Fred van Keulen (supervisor) and Matthijs Langelaar (supervisor)

Equipment in the high tech industry relies on high-performance motion systems. To meet future performance targets and time-to-market demands, effective design optimization methodologies for these systems are essential. Moreover, maturing additive manufacturing (AM) technologies are enabling highly complex 3D components. To turn unprecedented design freedom offered by AM into performance gains for motion systems, novel design synthesis techniques are required.

Objective

IMSYS-3D will enable integrated and simultaneous controller and structure optimization for motion systems, using 3D topology optimization combined with dedicated parallel solution techniques. We address the specific challenges associated with the step towards a realistic, 3D topology optimization setting, and include AM restrictions in the design process to ensure manufacturability. Advanced industrial prototypes will be realized and tested to demonstrate the motion system performance gains achieved by combining AM and integrated design optimization.

Results

Combining AM and topology optimization enables the systematic and fast design of high-precision motion systems, as is shown in the figures. With all the relevant manufacturing considerations, a ready-to-print, high-resolution optimized design was generated in a single day. In terms of performance, the optimized motion system outperforms reference designs by a factor two in eigenfrequencies.

Figure 1. The optimized design at different process steps: (a) the design after additive manufacturing, (b) the design after machining, (c) the final assembled design, and (d) a cross-section showing internal structures. The arrow indicates the build direction.
(a) Printed(b) Machined
(c) Assembled(d) Internal structure
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