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MSD Research

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MSD Research

Precision positioning

Positioning stages, magnetic multi-degree-of-freedom drives, for semiconductor industry and scientific instrumentation.

Precision Robots

Aimed at high-speed high-precision pick-and-place manipulators in High-Tech Industry and Medical Instruments.

Tribotronics

Full-film tribology, active surfaces and multi-physics modelling for contactless handling.

Compliant Mechanisms

With a focus on static balancing, spatially curved flexures, micromechanisms, and their nonlinear behaviour.

Distributed Mechatronics

The combination of compliant motion, distributed actuation and self-sensing leads to a new generation of mechatronics.

Motion Control

Unifying advanced control concepts, compatible with current industry standards.

MECOMOS

Mechanical metamaterials for compact motion systems

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Precision and Microsystems Engineering (PME)

Department of faculty 3mE, TU Delft

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Home of TU Delft
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    • NERI
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    • Optics for Technology (OPT)
  • Faculty 3mE
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