Midterm colloquium Patrik de Carvalho Monteiro

01 August 2018 14:00 till 14:30 - Location: instruction room G, 3me - By: DCSC

"Model Predictive Control for Reticle Cooling"

During the exposure process of the NXT machine at ASML, problems occur due to reticle heating.

In this project, the consequences of reticle heating are discussed along with how they could be solved using adaptive cooling.

The problem is defined in terms of a performance index and constraints, which fits the Model Predictive Control (MPC) framework.

The principle of MPC is explained and results are compared to the current state of the art.

Dr. P. Mohajerin Esfahani