Workshop: Fundamentals of ALD

Workshop on Fundamentals of Atomic Layer Deposition: Modelling and Validation

July 3rd 2019, TU Delft, The Netherlands

 

We are excited to announce a one day workshop at TU Delft on modelling and experimental analysis of ALD processes. We are hosting an international group of invited speakers who will present simulation and experimental work on fundamentals and applications of ALD. 

The workshop includes five invited sessions, one lecture on simulating ALD, lunch and a poster session.

Students are encouraged to bring posters to present their research to the community.

  • Date: July 3rd, 2019

Program:

9:30-9:45       Opening and welcome
                            Fatemeh Hashemi (TU Delft, The Netherlands)

9:45-10:25     Session 1: Surface coverage in ALD
                            Riikka Puurunen (Aalto University, Finland)

10:25-11:05   Session 2: ALD of nanostructures
                            Simulation: Fabio Grillo (ETH, Switzerland)
                            Experiment: Damiano La Zara (TU Delft, The Netherlands)

11:05-11:45   Session 3: Area-selective ALD
                            Simulation: Esteban Marques (IMEC, Belgium)
                            Experiment: Job Soethoudt (IMEC, Belgium)

11:45-1:15       Lunch + Poster Session

1:15-2:30         Mini Lecture by Angel Yanguas-Gil (Argonne National Lab., USA)
                            “From nanoscience to nano-manufacturing: a simulation approach to understanding throughput and                             conformality of atomic layer deposition” 

2:30-3:10         Session 4: ALD of 2D materials
                            Simulation: Mahdi Shirazi (TU Eindhoven, The Netherlands)
                            Experiment: Shashank Balasubramanyam (TU Eindhoven, The Netherlands)

3:10-3:50         Session 5: ALD for photocatalytic reactions
                            Simulation: Stephen Rhatigan (Tyndall, Ireland)
                            Experiment: Hamid Zafarani (TU Delft, The Netherlands)

3:50-4:30         Closing