Kees Hagen
Biography
Cornelis W. Hagen is associate professor at Delft University of Technology. His area of research is microscopy and lithography with charged particles. He is involved in the development of novel electron and ion sources, and his main interest, at present, is focused electron-beam-induced processing (FEBIP) and resist-based electron beam lithography for the fabrication of structures with sizes between 1 and 20 nm. He is co-author of over 60 papers in peer-reviewed journals and conference proceedings, a book on electron-beam-induced nanometer-scale deposition, and a patent. From 2000-2003 he served as a member of the EuroFE coordination committee, an ESF network committee. In 2006 he organised the first International Workshop on Electron-Beam-Induced Deposition in Delft, The Netherlands, and he is chairman of the International Steering Committee of the FEPIP workshops.
Research Projects
- Nanoned Project
Dr. C.W. Hagen (Kees)
- +31 (0)15 2786073
- C.W.Hagen@TUDelft.nl
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Room F 064
Publications
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2022
Monte Carlo simulation of the secondary electron yield of silicon rich silicon nitride
A. M.M.G. Theulings / S. X. Tao / C. W. Hagen / H. Van Der Graaf
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2021
Combined focused electron beam-induced deposition and etching for the patterning of dense lines without interconnecting material
Sangeetha Hari / P. H.F. Trompenaars / J. J.L. Mulders / Pieter Kruit / C. W. Hagen
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2021
Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition
Cristiano Glessi / Aya Mahgoub / Cornelis W. Hagen / Mats Tilset
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2021
Mechanical characterization of nanopillars by atomic force microscopy
L. Angeloni / M. Ganjian / M. Nouri-Goushki / M. J. Mirzaali / C. W. Hagen / A. A. Zadpoor / L. E. Fratila-Apachitei / M. K. Ghatkesar
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2021
Multiple criteria optimization of electrostatic electron lenses using multiobjective genetic algorithms
Neda Hesam Mahmoudi Nezhad / Mohamad Ghaffarian Niasar / Ali Mohammadi Gheidari / Pieter Kruit / Cornelis Wouter Hagen
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