Leybold L560
Apparatus | L560 evaporation system |
Supplier | Leybold Heraeus |
Location | P00.330 |
Main purpose | Evaporation |
System layout | evaporation by e-beam heating (4x 4cc crucible liners) evaporation by resistive heating |
Power supply | 12kV HV for e-beam and 5V/800A AC for resistive heating |
Process information | a wide range of materials can be deposited, due to the absence of a loadlock, for example: Al2O3, C, SiO2, TiO2, Ag, Al, Au, AuPd, AuGe, Bi, Cr, In, Mo, Ni, NiCr, NiFe, Nb, Pd, Pt, PtPd, Ru, Si, Ti, Ta, V, W, Zr |
Facilities | reactive evaporation (with low O2 or N2 pressure) |
Specimen | max. 100mm wafers, small pieces allowed |
Equipment Owner: | Marinus Fischer +31 628906207
|