Inspection

Bruker FastScan AFM
Atomic force microscope

Bruker Dektak XT
Profilometer

FEI Strata 235
FIB/SEM

FEI NovaNanoSEM
SEM with EDX

Hitachi S4800 SEM
SEM (high-resolutions)

JEOL JEM-1400
TEM 120 kV, with cryo plunger

Olympus Microscopes
various options

Renishaw Invia Reflex
Raman microscope

Probe Station
Electrical characterisation

Woollam M5000
Ellipsometer

Flexus (TOHO)
Stress meter

Luca Labs Pro4
4-point probe

KLA-Tencor D-120
Profilometer

FEI Helios G4 CX
FIB/SEM 

Bruker Dimension D8
XRD