Hitachi S4800

Apparatus

  

Hitachi ultra-high resolution FE-SEM  (S-4800)

Supplier

 

Hitachi; www.hitachi.com

Location

 

P.00.480

Function

 

Specimen surface inspection

Main purpose

 

Ultra high resolution and Ultra low voltage imaging

Main Characteristics

 

SE images resolution 1.0nm at 15kV

2.0nm at 1kV

1.4nm; at 1kV with Beam Deceleration

Stage tilt up to 70o

Acceleration voltage 100V to 30kV

Facilities

 

Load-lock, Stage lock, IR Camera, anti-contamination trap(LN2 cooled plate)

Specimen

 

Max. 4 inch in diameter

Equipment owner

 

Hozanna Miro

h.miro@tudelft.nl

+31 650559998

 

Lodi Schriek (back-up)

L.N.Schriek@tudelft.nl

+31 634321293