Probe Station
Apparatus |
| Probe Station, MicroXact SPS-1000 |
Supplier | home-built electronics | |
Location | P.00.390 | |
Function | Electrical characterisation | |
Main purpose | 4 point probing | |
Main characteristics | ||
Facilities | - Vla module, for resistance measurements (replaces S3b, M1b and M0) - MO iso-out module, to read out user supplied amplifier modules - summing module S2d - O2 battery check module - 8 channel DAC module D5 - PC-interface module with optical fiber and adapter, for setting the DACs
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Typical application | ||
Specimen | 100mm wafers and small pieces | |
Equipment owner | Lodi Schriek +31 634321293
Roald v.d. Kolk (back-up) +31 634321301 |