Lithography

Raith EBPG 5000+
e-beam exposure

Raith EBPG5200
e-beam exposure

Delta RC80
spin coating, EBR, HDMS primer

DMO Laserwriter
Laserwriter

Suss Microtech DUV
DUV

Suss Microtech MA-8
NUV + SCIL

Wet Benches Lito
Spin coating + baking

Photomask Cleaner

Gyrset RC8

EVG-620
NUV

Heidelberg Instruments
Laserwriter