Tousimis 815B
Apparatus |
| Tousimis |
Supplier | Solaris | |
Location | P.00.300 (TU2) | |
Function | Super critical CO2 drying | |
System specifications | ||
Chuck | ||
Specimen | Max. 100mm wafers, small pieces allowed | |
Equipment owner | Pauline Stevic +31-6 3408 1404 | |
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