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Process Recipes

For most processes there are recipes available. They are sorted by process type. Select the process in the list below or in the navigation bar on the left.

There is also a Wiki for the equipment and recipes. You can find it here.

Resist Recipes

Wet Processing

Deposition

Dry Etch

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Applied Sciences

Quantum Nanoscience

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Home of TU Delft
  • Education
    • Bachelor programmes
    • Minors and electives
    • Master programmes
    • Exchange students
  • Research
    • Research areas
    • Stories of scientists
    • PhD
  • Business
    • Need a graduate or student?
    • Contract Research
    • Facilities
    • Courses & Postgraduate Programmes
  • News
    • Agenda
    • Latest News
    • Press officers
  • About Faculty
    • Dean
    • Profile, facts and figures
    • Professors
    • Institutes & Research Schools
    • Departments
    • Prizes
    • Contact and route
    • Associations & Societies
    • Vacancies