Dry Etch

To find the recipe for a material X in a system Y, click on the appropiate cross point, or click on a system name for a list of all the recipes on that machine.

System

Material

 

Leybold Fluor RIE

GIR 300 Chlorine RIE

AMS 100 Bosch

AMS 100 Cryo

Oxford ICP 180

 Silicon (Si)

 

 

 

 

 Poly silicon (Si)

 


 

 

 

 Silicon oxide (SiO2)

 

 

 

 

 Silicon oxide (SiO2) (alternative)

 

 

 

 Silicon nitride (SiNx

 

 

 

 

 Silicon Germanium (Si-Ge alloy)

 

 

 

 

 Germanium (Ge) (sputtered)

 

 

 

 

 Aluminium (Al)

 

 

 

 

Aluminium Oxide

 Titanium (Ti) (sputtered)

 

 

 

 Tungsten (W) (sputtered)

 

 

 

 

 Tungsten (W) (evaporated)

 

 

 

 

 Tantalum (Ta)

 

 

 

 

 Molybdene

 

 

 

 

 PMMA (organic mask)