UV Lithography
| A. Positive Tone Resist | ||
|---|---|---|
| AZ5214 | ||
| AZ10XT | ||
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| B. Negative Tone Resists | ||
| AZ5214 (image reversal) | ||
| MaN1410 | ||
| SU8-3000 | ||
| C. Laser Writer | ||
| AZ-ECI-3007 DWL(positive) | ||
| AZ5214 positive mode | ||
| S1805 (positive) | ||
| AR-N 4400 (negative) | ||
AZeci3007/Lor5b double layer resist |