Structure in thin films
Measuring layer thickness, composition and roughness
The ROG neutron reflectometer can provide information about the thickness, composition and roughness of thin films and other layered structures. This set-up can be used to study (stacks of) layers with thicknesses of 5 - 150 nm while providing a resolution up to 0.2 nm. Neutron reflectometry can be used to non-destructively study both liquid and solid samples in a variety of different experimental conditions.
Using Neutron Depth Profiling (NDP) the concentration of, for example, He, Li, B or N can be measured as a function of the depth in different substrates.
Defects in thin layers up to a few micrometers thick can be investigated using positrons.