Structure in thin films
Measuring layer thickness
The ROG neutron reflectometer can measure multiple layer thicknesses up to a total thickness of 300 nm with a resolution of 1 nm.
Using Neutron Depth Profiling (NDP) the concentration of, for example, He, Li, B or N can be measured as a function of the depth in different substrates.
Defects in thin layers up to a few micrometers thick can be investigated using positrons.