Structure in thin films

Measuring layer thickness
The ROG neutron reflectometer can measure multiple layer thicknesses up to a total thickness of 300 nm with a resolution of 1 nm.

Measuring concentrations
Using Neutron Depth Profiling (NDP) the concentration of, for example, He, Li, B or N can be measured as a function of the depth in different substrates.

Investigating defects
Defects in thin layers up to a few micrometers thick can be investigated using positrons.

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