Fourier scatterometry for detection of particles on surfaces

Themes: Software technology & Intelligent systems


Early prototype

A TRL is a measure to indicate the matureness of a developing technology. When an innovative idea is discovered it is often not directly suitable for application. Usually such novel idea is subjected to further experimentation, testing and prototyping before it can be implemented. The image below shows how to read TRL’s to categorise the innovative ideas.

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Why?


Noninvasive detection of nano-particles for flexible electronics.

How?


Scattering of coherent light from the surface is detected in the far field.

When?


A prototype is installed in an industrial environment. Upgrade: 1-2 years.

Dr. Silvania Pereira

 

Dr. Alberto da C. Assafrao

Roland Horsten

Sarathi Roy

Thim Zuidwijk