Ing. C.R. de Boer

publicaties
Low-temperature wafer-level packaging of a MEMS microreactor with a lateral feedthrough by local PECVD TEOS deposition

peer reviewed : Y

Proceeding title: Proceedings of the Eurosensors XXIII Conference (2009) 4 pagina's , p. 1531-1534

auteurs

  • L Mele
  • B Morana
  • CR de Boer
  • JF Creemer
  • PM Sarro

redacteuren

  • J Brugger
  • D Briand
Microhotplates with TiN heaters

peer reviewed : Y

Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers (2008) 6 pagina's , p. 416-421

auteurs

  • JF Creemer
  • D Briand
  • HW Zandbergen
  • W van der Vlist
  • CR de Boer
  • NF de Rooij
  • PM Sarro
Step coverage of ALD nanolayers on 3D microstructures

peer reviewed : Y

APCTP-ASEAN workshop on advanced material science and nanotechnology (2008) 6 pagina's , p. 547-552

auteurs

  • HTM Pham
  • L Constanzo
  • CR de Boer
  • PM Sarro

redacteuren

In-situ isotropic and anisotropic DRIE sequence for massive parallel multistage Brownian ratchets

peer reviewed : Y

Proc. Transducers 2007 Conference (2007) 4 pagina's , p. 497-500

auteurs

  • HTM Pham
  • CR de Boer
  • J Wei
  • PM Sarro

redacteuren

  • G Delapierre
  • R Puers
Integration of a ¿hands-on¿ research training course in a high-discipline IC-processing research cleanroom

peer reviewed : Y

2nd International Conference on Engineering Education& Training (2007) 4 pagina's , p. 1-4

auteurs

  • S Milosavljevi¿
  • H Schellevis
  • A van Bogaard
  • TLM Scholtes
  • JMW Laros
  • CR de Boer
  • EJG Goudena
  • LK Nanver

redacteuren

Roughness treatment of silicon surface after Deep Reactive Ion Etching

peer reviewed : Y

SAFE 2007 Semiconductor advances for future electornics (2007) 4 pagina's , p. 535-538

auteurs

  • HTM Pham
  • CR de Boer
  • PM Sarro

redacteuren

Evaluation of an empirical model to estimate and optimize mechanical properties of pecvd sic films

peer reviewed : Y

Electrochemical Society. Journal (2005) 5 pagina's , p. 889-893

auteurs

  • TMH Pham
  • CR de Boer
  • CCG Visser
  • PM Sarro
MEMS Hotplates with TiN as a Heater Material

peer reviewed : Y

IEEE Sensors 2005 (2005) 4 pagina's , p. 330-333

auteurs

  • JF Creemer
  • D Briand
  • W van der Vlist
  • CR de Boer
  • HW Zandbergen
  • PM Sarro

redacteuren

Non-catalyst and low temperature growth of vertically aligned carbon nanotubes for nanosensors arrays

peer reviewed : Y

Transducers'05 (2005) 4 pagina's , p. 97-100

auteurs

  • HMT Pham
  • CR de Boer
  • PM Sarro

redacteuren

Nanostructure formation on anodic aluminium oxide nanotemplates

peer reviewed : Y

Proceedings of the Second international workshop on nanophyiscs and nanotechnology (IWONN'04) (2004) 8 pagina's , p. 91-98

auteurs

  • TMH Pham
  • CR de Boer
  • PM Sarro