
Dr. C.W. Hagen
Dr. C.W. Hagen
Profiel
Biografie
Cornelis W. Hagen joined the Delft University of Technology in 1994 as an assistant professor and was appointed as associate professor in 2008. His area of research is microscopy and lithography with charged particles. He is involved in the development of novel electron and ion sources, and his main interest, at present, is focused electron-beam-induced processing (FEBIP) and resist-based electron beam lithography for the fabrication of structures with sizes between 1 and 20 nm. He is co-author of over 90 papers in peer-reviewed journals and conference proceedings, a book on electron-beam-induced nanometer-scale deposition, and 2 patents. From 2000-2003 he served as a member of the EuroFE coordination committee, an ESF network committee. In 2006 he organized the first International Workshop on Electron-Beam-Induced Deposition in Delft, The Netherlands, he is chairman of the International Steering Committee of the FEBIP workshops, and co-chair of the EU-COST Action CM1301 CELINA. In 2015 he was conference chair of the 41st International Micro and Nano Engineering conference MNE2015 in the Hague, The Netherlands.
Expertise
Publicaties
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2022
Electron-beam patterned calibration structures for structured illumination microscopy
Sangeetha Hari / Johan A. Slotman / Yoram Vos / Christian Floris / Wiggert A. van Cappellen / C. W. Hagen / Sjoerd Stallinga / Adriaan B. Houtsmuller / Jacob P. Hoogenboom
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2022
Monte Carlo simulation of the secondary electron yield of silicon rich silicon nitride
A. M.M.G. Theulings / S. X. Tao / C. W. Hagen / H. Van Der Graaf
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2022
Ultra-thin corrugated metamaterial film as large-area transmission dynode
H. W. Chan / V. Prodanović / A. M.M.G. Theulings / T. ten Bruggencate / C. W. Hagen / P. M. Sarro / H. V.D. Graaf
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2021
Combined focused electron beam-induced deposition and etching for the patterning of dense lines without interconnecting material
Sangeetha Hari / P. H.F. Trompenaars / J. J.L. Mulders / Pieter Kruit / C. W. Hagen
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2021
Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition
Cristiano Glessi / Aya Mahgoub / Cornelis W. Hagen / Mats Tilset
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