Dr. C.W. Hagen

Dr. C.W. Hagen



Cornelis W. Hagen joined the Delft University of Technology in 1994 as an assistant professor and was appointed as associate professor in 2008. His area of research is microscopy and lithography with charged particles. He is involved in the development of novel electron and ion sources, and his main interest, at present, is focused electron-beam-induced processing (FEBIP) and resist-based electron beam lithography for the fabrication of structures with sizes between 1 and 20 nm. He is co-author of over 90 papers in peer-reviewed journals and conference proceedings, a book on electron-beam-induced nanometer-scale deposition, and 2 patents. From 2000-2003 he served as a member of the EuroFE coordination committee, an ESF network committee. In 2006 he organized the first International Workshop on Electron-Beam-Induced Deposition in Delft, The Netherlands, he is chairman of the International Steering Committee of the FEBIP workshops, and co-chair of the EU-COST Action CM1301 CELINA. In 2015 he was conference chair of the 41st International Micro and Nano Engineering conference MNE2015 in the Hague, The Netherlands.

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