Silvania Pereira
Research Interest: optical physics, optical metrology, scatterometry
Academic Background:
Silvania F. Pereira studied Physics in Brazil, where she received her B.Sc and M.Sc. degrees from the University of Campinas. Afterwards she went to the USA where she got her Ph.D. in 1993 from the University of Texas. During her PhD she spent some years doing research at Caltech, California. Her Ph.D. thesis was in the field of experimental quantum optics. Silvania gained her post-doctoral experience at the University of Constance in Germany after receiving the Humboldt fellowship. In addition, she worked as a post-doc for 3 years at the University of Leiden in The Netherlands. Her extensive research experience is in the fields of quantum and classical optics. Currently, she holds an Associate Professor position at the Delft University of Technology in The Netherlands, where she focuses her research in the fields of diffraction and vectorial optics, optical far field techniques for nano-particle detection and nano-structure characterization and optical metrology. Further, she is member of the board of PhotonicsNL, the Dutch Portal for Optics and Photonics and of the sounding board of the Dutch Network of Women Professors (LNVH). She is also active in the Women in Photonics in Benelux LinkedIn Group.
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2024
Investigation of coherent Fourier scatterometry as a calibration tool for determination of steep side wall angle and height of a nanostructure
A. Paul / J. Rafigh Doost / X. Dou / S.F. Pereira
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2024
Multi-beam coherent Fourier scatterometry
S. Soman / R.C. Horsten / T.C. Scholte / S.F. Pereira
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2024
Optimal parameter estimation of shaped phase objects
Arturo Villegas / M. H.M. Passos / Silvania F. Pereira / Juan P. Torres
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2023
Coating layer on samples with roughness
numerical study for coherent Fourier scatterometry
D. Kolenov / S. F. Pereira -
2023
Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples
Jila Rafighdoost / Dmytro Kolenov / Silvania F. Pereira
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