AC EVA
Apparatus |
| AC450 |
Supplier | Alliance Concept | |
Location | P00.390 | |
Main purpose | evaporator | |
System layout | evaporation by e-beam heating (3x 7cc crucible liners) Argon ion milling in the load-lock | |
Gasses | Ar, N2 | |
Power supply | ||
Process information | Materials: Cu, Ni, NiFe, Au | |
Facilities | Deposition under an fixed angle is possible | |
Specimen | max. 50mm wafers, small pieces allowed | |
Equipment owner | Bas van Asten +31 642481091
Marinus Fischer (back-up) +31 628906207 |