Dry Etching

AMS Bosch
Deep Si Bosch ICP etcher

AMS Cryo
Deep Si Bosch ICP etcher

Sentech F1
Fluorine RIE

Sentech F2
Fluorine RIE

Oxford Instruments Plasmalab 100
ICP RIE with Cl chemistry

Tepla 300
Barrel etcher/stripper

SCIA
Ion beam etcher

Oxford Instruments PlasmaPro 100 Estrelas
Deep SI etching 

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