FEI NovaNanoSEM
Apparatus |
| FEI NovaNano SEM |
Supplier | FEI; www.fei.com | |
Location | P.00.480 | |
Function | Specimen surface inspection | |
Main purpose | Ultra high resolution and Low vacuum inspection | |
Main Characteristics | ||
Facilities | EDX | |
Specimen | Max. 4 inch in diameter | |
Equipment owner | Hozanna Miro +31 650559998
Lodi Schriek (back-up) +31 634321293 |