FR-pOrtable Reflectometer

Apparatus

  

FR-pOrtable Reflectometer

Supplier

  Thetametrisis

Location

  TU2 (P.00.400)

Function

 

Accurate & precise non-destructive characterization of transparent and semitransparent single films or stack of films at a fixed angle of incidence.

Main Purpose

  Polarisation independent measurements to model layer thickness, refractive index, uniformity, roughness

Main Characteristics

  Bandwidth 370..1020 +/-0,8 nm
Layer thickness range 20 nm..90 µm +/- 0,05 nm

Facilities

 

Spectrometer

Specimen

  Any size, sample thickness max 10 mm

Equipment Owner

  L.N. Schriek
L.N.Schriek@tudelft.nl
+31 634321293

R.J.H. van der Kolk (back-up)
R.J.H. van der Kolk@tudelft.nl
+31 634321301