Woollam M-2000
Apparatus |
| M-2000 (XI-210) |
Supplier | Woollam (https://www.jawoollam.com/download/pdfs/m-2000-brochure.pdf) | |
Location | P.00.351 (TU 14 1/2) | |
Function/Measurement modes | Automated angle (45-90o), 210-1690 nm, 675 wavelengths Ellipsometry: Ψ (0o-90o) and Δ (0o-360o), Transmission intensity [%], Transmission reflection intensity [%] Reflection Depolarization [%]. | |
Chuck | Automated XY mapping, 6 inch | |
System specifications | Look-down camera, focus probes | |
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Equipment owner | L.N. Schriek 0634321293
R. van der Kolk (back-up) 0634321301 |