Delta RC80

It has a gyrset system, which is a bell-shaped cover, placed over the chuck and the substrate. During the spinning cycle, the cover closes and all parts of the gyrset rotate synchronously, creating a solvent-saturated ambiance. The confined air inside the cover, turns also synchronously. The result is a resist coat evenly spread over the entire surface without spinning defects. The gyrset makes it possible to spin coat very thin layers of resist without the need of diluting the resist. The unit has also the possibility of edge bead removal as well as HMDS priming and baking.

Apparatus

Delta RC80

Supplier

Suss Microtech

Function

Spincoater

Main Purpose

Spincoating resist, edge bead removal, baking and HMDS primer

Main Characteristics

Gyrset system

Max. spinspeed with closed gyrset lid: 4000 rpm

Max. spinspeed with open gyrset lid: 1000 rpm

Baking time: <999 sec

Hotplate temperature: atleast up to 200C

Edge bead removal: approximately 2.5 mm

Specimen

Max. 4 inch

Max. substrate thickness: 2 mm

Equipment Owner

Eugene Straver

e.j.m.straver@tudelft.nl

+31-618242212
 

Brian van der Bulk (back-up)

B.P.vandenBulk@tudelft.nl

+31-6 3408 1404