Gyrset RC8
It has a gyrset system, which is a bell-shaped cover, placed over the chuck and the substrate. During the spinning cycle, the cover closes and all parts of the gyrset rotate synchronously, creating a solvent-saturated ambiance. The confined air inside the cover, turns also synchronously. The result is a resist coat evenly spread over the entire surface without spinning defects. The gyrset makes it possible to spincoat very thin layers of resist without the need of diluting the resist.
| Apparatus | Karl Suss RC8 |
| Supplier | Karl Suss |
| Function | Spincoater |
| Main Characteristics | Gyrset system Max. spinspeed with gyrset: 3000 rpm Max. spinspeed without gyrset: 5000 rpm |
Specimen | Max. 8 inch Available chucks: 2" (also used for small pieces) and 4" wafers, 4" and 5" photomasks Max. substrate thickness: 3 mm |
| Equipment Owner | Anja van Langen a.k.vanlangen-suurling@tudelft.nl +31-15-2787198 |