AR-N-7700

Tone

Negative

Reference

All resist: https://www.allresist.com/portfolio-item/e-beam-resist-ar-n-7700-series/

Spin coat

Prebake

on plate in oven 85^oC, 1 min.

Exposure

Clearance dose 117 µC/cm² Si or 130 uC/cm² metal substrates

on plate in oven 105^oC, 2 min

Development

MF321 for 1 minute ( vertical)

Rinse

1) MF321 : H2O = 1 : 10 for 15s (2x in a fresh bath)

2) in H20                                      (2x in a fresh bath)