Probe Station

Apparatus

  

Probe Station, MicroXact SPS-1000

Supplier

 

home-built electronics

Location

 

P.00.390

Function

 

Electrical characterisation

Main purpose

  4 point probing

Main characteristics

   

Facilities

 

- Vla module, for resistance measurements (replaces S3b, M1b and M0)

- MO iso-out module, to read out user supplied amplifier modules

- summing module S2d

- O2 battery check module

- 8 channel DAC module D5

- PC-interface module with optical fiber and adapter, for setting the DACs

 

Typical application

   

Specimen

  100mm wafers and small pieces

Equipment owner

 

Lodi Schriek

L.N.Schriek@tudelft.nl

+31 634321293

 

 

 

+31 6