Else Kooi Laboratory

About EKL

The Delft University of Technology harbours two of the main cleanroom infrastructures of the Netherlands: The Kavli Nanolab (KNL) and The Else Kooi Laboratory (EKL). Both laboratories provide access to high-end, state-of-the-art process and inspection equipment for academic and industrial users.

The cleanroom infrastructure of the Delft University of Technology is a partner in NanoLabNL, which is the Dutch national facility for nanotechnology research. It offers the use of facilities and expertise to universities, research institutes, start-ups, and industry. The NanoLabNL facilities are an important link in the innovation process from basic idea to product. In this role NanoLabNL supports fundamental research, process and product development and small-scale production.

EKL is one of the biggest cleanrooms in The Netherlands with over 600 m2 of cleanroom class 100 (ISO 5) and 400 m2 of cleanroom class 10'000 (ISO 7). It is located in Building 36, EWI Faculty, and allows full fabrication and characterisation of any active or passive nanostructure starting from a silicon wafer. The laboratory offers sub-micrometer resolution lithography, thin film deposition and etching, bulk and surface micromachining, packaging, and assembly of the final device. Moreover, polymer based, biocompatible and biodegradable devices can be fully fabricated and synthesized in EKL.

EKL is collaborating with many research groups such as BioelectronicsECTM, EIPMEPVMDQuTech, Terahertz Sensing. Moreover, EKL offers foundry and joint development services, allowing the collaboration with different companies in the many disparate fields. The EKL team can assist you in design and provide fabrication and characterization of your device. In Applications, you can find some of the of the devices that have been fully fabricated in the EKL and KN facilities.