Kavli Nanolab News no.13
Safety
In case of pregnancy it is not allowed to use the cleanroom. It was already forbidden to do resist processing, but in order to avoid any risk this rule is extended to the entire cleanroom. The new rules and regulations (versions 3.3) will soon be published on the KN website.
Cleanroom works and maintenance week
Piling activities for the new student apartments across the Stieltjesweg will strongly hinder the processing in the cleanroom. Activities will take place between 7:00 and 19:00 each day Monday – Saturday in weeks 42, 43, 46 and 47. We expect that high-accuracy work cannot be done, like EBL and SEM.
In order to minimize cleanroom downtime for you as a user the VLL maintenance week has been shifted from week 50 to week 47. Preventive maintenance of the EBPG5000+ and the upgrade of the EBPG5200 with the new UPG pattern generator is also planned for week 47.
Fade out of ZEP resist
ZEP5200, a widely used high-resolution positive tone EBL resist, will be faded out and by the end of the year it will no longer be available for KN users. As an alternative AR-P 6200 resist of the company All Resist can be used. For any questions please consult Anja van Langen.
Equipment
The new EBL system (Raith EBPG5200) has been accepted and is now available for authorised users of the EBPG5000+. If you want an introduction please ask Anja or Arnold. They will explain the differences with the 5000+ and will run a first job together.
A new set-up will be installed to enable galvanic electroplating of gold. By this additive deposition method the gold only grows where needed and is much more efficient in terms of materials usage than via PVD and etching. It is therefore advised for deposition of relatively thick films.
Low magnification camera
For users who would like to grab an image of their full device we have installed a low-magnification camera in TU8. For instruction please ask the KN staff.