PMMA for EBPG Recipe
Application
tone | positive |
special | Also applicable for DUV use. Available in several concentrations and moleculare weights |
reference | |
spin coat | see spincurves below (to be added) |
pre bake |
2 minutes on hotplate @175oC (for thicknesses <500nm) or 30 minutes on hotplate @175oC (for thicknesses > 500nm)
|
exposure | clearance dose 600 uC/cm2 |
development | 60 s in MIBK : IPA = 1 : 3 |
stopping | 30 s in IPA |