Dr.ir. M. (Marcel) Tichem

Dr.ir. M. (Marcel) Tichem



Marcel leads a research program on manufacturing at the small length-scale. His interests include micro-assembly, photonic alignment, self-assembly of discrete components and nanomaterials, and nanoparticle patterning. Among key results are micro-fabricated structures and MEMS functions to achieve high precision alignment in integrated photonic systems, and magnetic-driven self-alignment of ultra-thin chips for flexible electronic packages.
Currently, he focuses on volume scale-up of manufacturing for 3D, nano-enabled materials and devices, with key applications in micro-mechanical and multi-physics metamaterials and nanoparticle-based functionalities. 
Marcel has been active in setting up collaborative research programs, both within the university (e.g. Delft Centre of Mechatronics and Microsystems, DCMM, 2003-2010) and with industrial stakeholders, amongst others as part of the Nano Engineering Research Initiative (NERI) which he led to establish. He is currently the scientific leader of a large collaborative research program with Nexperia-ITEC on new processes for massive chip assembly (2021 and onward). He was a Research Fellow, funded by an EU Marie Curie IEF grant, in the Optical and Semiconductor Devices Group, Imperial College, London, in 2011, to investigate volume methods for nano-particle patterning.



  • X.AL: next generation chip assembly processes.
    Scientific project leader.
    Large direct collaboration (6 PhD + 2 Postdoc) with Nexperia-ITEC.
    Direct funding, RvO grant.
  • MECOMOS: mechanical metamaterials for compact motion systems.
    Project leader.
    Joint project with Prof. Dr. J.L. Herder and Dr. J.F.L. Goosen (TU Delft, PME).
    Funding: NWO-TTW.
  • Dry Aerosol Direct Writing for Selective Nanoparticle Deposition.
    Project leader.
    Joint project with Dr. A. Accardo (TU Delft, PME).
    TU Delft internal funding.

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Research interests

micro and nano engineering and manufacturing



scale-up micro and nanomanufacturing

micro-mechanical metamaterials


photonic alignment

massive chip assembly

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Ancillary activities