Prof.dr. U. (Urs) Staufer

Prof.dr. U. (Urs) Staufer



I studied Physics, Mathematics and Philosophy at the University of Basel, Switzerland, where I received my PhD   summa cum laude  in 1990 with a thesis on how to use the Scanning Tunnelling Microscope as a tool for surface modification. I then joined as postdoc the IBM T.J. Watson Research Center in Yorktown Heights, USA for conducting work on a microfabricated electron-beam writer. Returning back to Switzerland, I stayed at the Univ. of Basel, IBM Rüschlikon Research Laboratory and the Univ. of Neuchatel, where I was leading the group ‘Tools for Nanoscience’. In 2003, I became associated Professor in Neuchatel, and in 2007, I was appointed full professor at TU Delft in the Netherlands, where I am leading the Micro and Nano Engineering Laboratory ever since. From 2012 until 2016, I was also head of the department PME (Precision and Microsystem Engineering) and from 2015-2016 vice dean of the faculty of Mechanical, Maritime and Material Engineering. In 2017, I could spend a few months of sabbatical as visiting scientist at the Institut de Ciències Fotòniques, ICFO in Barcelona, Spain, and in 2018 at the Istituto Italiano di Tecnologia, IIT in Lecce, Italy.

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Research interests

Atomic Force Microscopy



Microfabrication Technology


Scientific Instrumentation

Planetary Science

Nanosystems for Bio/Health applications




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Ancillary activities

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