Dry Etching

AMS Bosch
Deep Si Bosch ICP etcher

AMS Cryo
Deep Si Bosch ICP etcher

Leybold F1
Fluorine RIE

Leybold F2
Fluorine RIE

Leybold F3
Fluorine RIE (Ti and Nb)

Oxford Instruments Plasmalab 100
ICP RIE with Cl chemistry

Alcatel GIR-300
RIE with Cl chemistry (specials)

Oxford Instruments PlasmaPro 100 Estrelas
Deep SI etching 

Tepla 300
Barrel etcher/stripper

SCIA
Ion beam etcher