Publications

• 2021

  Design and fabrication of networks for bacterial computing

  Falco C.M.J.M. Van Delft / Ayyappasamy Sudalaiyadum Perumal / Anja Van Langen-Suurling / Charles De Boer / Ondřej Kašpar / Viola Tokárová / Frank W.A. Dirne / Dan V. Nicolau

• 2009

  Low-temperature wafer-level packaging of a MEMS microreactor with a lateral feedthrough by local PECVD TEOS deposition

  L Mele / B Morana / CR de Boer / JF Creemer / PM Sarro

• 2008

  Microhotplates with TiN heaters

  JF Creemer / D Briand / HW Zandbergen / W van der Vlist / CR de Boer / NF de Rooij / PM Sarro

• 2008

  Step coverage of ALD nanolayers on 3D microstructures

  HTM Pham / L Constanzo / CR de Boer / PM Sarro

• 2007

  In-situ isotropic and anisotropic DRIE sequence for massive parallel multistage Brownian ratchets

  HTM Pham / CR de Boer / J Wei / PM Sarro

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