Publications

• 2014

  Carbon nanotube vertical interconnects fabricated at temperatures as low as 350 °C

  S Vollebregt / FD Tichelaar / H Schellevis / CIM Beenakker / R Ishihara

• 2014

  Research Update: Reactively sputtered nanometer-thin ZrN film as a diffusion barrier between Al and boron layers for radiation detector applications

  N Golshani / V Mohammadi / H Schellevis / CIM Beenakker / R Ishihara

• 2013

  Carbon nanotube vias fabricated at back-end of line compatible temperature using a novel CoAl catalyst

  S Vollebregt / H Schellevis / CIM Beenakker / R Ishihara

• 2013

  Shear mode resonators based on aluminum nitride round membranes with a ring-shaped electrode

  AT Tran / TSY Moh / G Pandraud / H Schellevis / AB Akhnoukh / PM Sarro

• 2013

  Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators

  AT Tran / O Wunnicke / G Pandraud / MD Nguyen / H Schellevis / PM Sarro

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