Publications

• 2010

  A novel 3-D tube shaped buried poly-Si Pirani gauge for extended dynamic range with small footprint

  F Santagata / E Iervolino / JMW Laros / J Groeneweg / JF Creemer / AW van Herwaarden / PM Sarro

• 2007

  Integration of a ¿hands-on¿ research training course in a high-discipline IC-processing research cleanroom

  S Milosavljevi¿ / H Schellevis / A van Bogaard / TLM Scholtes / JMW Laros / CR de Boer / EJG Goudena / LK Nanver

• 2003

  Polyimide sacrificial layer for an all-dray post-process surface micromachining module

  TMH Pham / A Bagolini / CR de Boer / JMW Laros / L Pakula / PJ French / PM Sarro

• 2003

  Polymide sacrificial layer for an all-dry post-process surface micromachining module

  TMH Pham / A Bagolini / CR de Boer / JMW Laros / L Pakula / PJ French / PM Sarro

• 2003

  Wafer thinning for high-density, through-wafer interconnects

  L Wang / CCG Visser / CR de Boer / JMW Laros / W van der Vlist / J Groeneweg / G Craciun / PM Sarro

• More publications