Publications

• 2012

  High-efficiency silicon photodiode detector for sub-keV electron microscopy

  A Sakic / G van Veen / K Kooijman / P. Vogelsang / TLM Scholtes / WB De Boer / J Derakhshandeh Kheljani / WHA Wien / S Milosavljevic / LK Nanver

• 2012

  Microcantilevers encapsulated in fluid wells for sensing in liquids

  WJ Venstra / WHA Wien / PM Sarro / J van Eijk

• 2011

  Enhancing the wettability of high aspect-ratio through-silicon vias lined with LPCVD silicon nitride of PE-ALD titanium nitride for void-free bottom-up copper electroplating

  M Saadaoui / H van Zeijl / WHA Wien / HTM Pham / C Kwakernaak / HCM Knoops / WMM Kessels / RMCM van de Sanden / FC Voogt / F Roozeboom / PM Sarro

• 2011

  Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy

  A Sakic / LK Nanver / G van Veen / K Kooijman / P. Vogelsang / TLM Scholtes / W de Boer / WHA Wien / S Milosavljevic / C.Th.H. Heerkens / T Knezevic / I Spee

• 2010

  Patterned growth of carbon nanotubes for vertical interconnects in 3D integrated circuits

  S Vollebregt / R Ishihara / WHA Wien / J van der Cingel / CIM Beenakker

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