X. Dou
X. Dou
Expertise
Publications
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2024
Investigation of coherent Fourier scatterometry as a calibration tool for determination of steep side wall angle and height of a nanostructure
A. Paul / J. Rafigh Doost / X. Dou / S.F. Pereira
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2024
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2023
Transversal optical singularity induced precision measurement of step-nanostructures
Xiujie Dou / Jiakang Zhou / Yuquan Zhang / Changjun Min / S. F. Pereira / Xiaocong Yuan
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2022
Optical singularity assisted method for accurate parameter detection of step-shaped nanostructure in coherent Fourier scatterometry
Xiujie Dou / Changjun Min / Yuquan Zhang / S. F. Pereira / Xiaocong Yuan
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2021
Determination of steep sidewall angle using polarization-sensitive asymmetric scattering
Xiujie Dou / Silvania F. Pereira / Changjun Min / Yuquan Zhang / Peiwen Meng / H. Paul Urbach / Xiaocong Yuan
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