Cleanrooms

The Delft University of Technology harbours two of the main cleanroom infrastructures of The Netherlands: The Kavli NanoLab (KNL) and the Else Kooi Laboratory (EKL). Both cleanrooms provide access to high-end, state-of-the-art process and inspection equipment for academic and industrial users. KNL and EKL each has decades of experience in micro- and nanofabrication. Both cleanrooms offer their specific expertise and in unison offer a wide range of services that will satisfy the majority of academic and industrial users.

As an important part of the ambition of the Quantum Delta National Growth Fund to position The Netherlands as a leading international centre and hub for nano- and quantum technology, funding has been made available to invest in facilities, high-tech equipment, and research and development. Investments in cleanroom infrastructure are made possible by funding through the Dutch national facility for nanotechnology research (NanoLabNL) as part of the Quantum Delta National Growth Fund. NanoLabNL offers the use of cleanroom facilities and expertise to universities, research institutes, start-ups, and industry. The NanoLabNL facilities are an important link in the innovation process from basic idea to product. In this role NanoLabNL supports fundamental research, process and product development and small-scale production. Next to KNL and EKL, Eindhoven University of Technology, University of Twente, University of Groningen and AMOLF are members of NanoLabNL.

Considering the growing demand from research and industry for cleanroom infrastructure the Delft University of Technology is currently developing plans for the realization of a new, single, larger cleanroom facility in the south side of the Delft campus. This new facility will harbour both KNL and EKL. In anticipation of the move to the new cleanroom efforts are underway to align activities at KNL and EKL, e.g., course program, safety procedures, equipment investments, etc. Ultimately, KNL and EKL will form a single organization for cleanroom infrastructure at the Delft University of Technology.